













voltage
380 V, 220V/110V
table travel (x) (mm)
5000, 3000, 2000, 1000, 900, 800, 300
table travel (y) (mm)
2500, 2200, 2000, 1200, 1000, 800, 600, 400
table travel (z) (mm)
500, 400, 360, 350, 300, 280, 250
positioning accuracy
±0.002
repeatability (x/y/z) (mm)
±0.003