Small ALD Reactor System for Semiconductor Research
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Attributes
220 VVoltage
10 kWPower(W)
PLC, Engine, Bearing, Gearboxcore components
Providedmachinery test report
1 Yearwarranty
Providedvideo outgoing-inspection
place of origin:Guangdong, China
Weight (kg):100
brand name:BW
Vacuum System:Molecular pump (cryogenic pump) + backing pump
Vacuum Limit:Better than 3.0*10^-5 Pa
Pumping Speed:Pumping to 5.0*10^-4 Pa ≤ 30 min
Substrate Stage Size:≥160*160 mm
Substrate Stage Structure:Drawer-type structure, rotating for masking
Substrate Temperature:Room temperature, heated, water-cooled
Electron Beam Source:4~6 cavity crucible
Film Thickness Monitoring:Crystal oscillator monitor, accuracy 0.1 K/s
Key attributes
Voltage
220 V
Power(W)
10 kW
core components
PLC, Engine, Bearing, Gearbox
machinery test report
Provided
warranty
1 Year
video outgoing-inspection
Provided
place of origin
Guangdong, China
Weight (kg)
100
brand name
BW
Vacuum System
Molecular pump (cryogenic pump) + backing pump
Vacuum Limit
Better than 3.0*10^-5 Pa
Pumping Speed
Pumping to 5.0*10^-4 Pa ≤ 30 min
Substrate Stage Size
≥160*160 mm
Substrate Stage Structure
Drawer-type structure, rotating for masking
Substrate Temperature
Room temperature, heated, water-cooled
Electron Beam Source
4~6 cavity crucible
Film Thickness Monitoring
Crystal oscillator monitor, accuracy 0.1 K/s
Packaging and delivery
Selling Units
Single item
Lead time
Product descriptions from the supplier
1 - 2 sets
£82,74728
≥ 3 sets
£75,22480
Variations
Select nowmodel number
BW
Shipping
Shipping fee and delivery date to be negotiated. Chat with supplier now for more details.
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