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Small Scale PECVD System for Semiconductor Research Wafer

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£82,66951
1 - 2 sets
£75,15410
≥ 3 sets

model number

BW

Key attributes

Voltage

220 V

Power(W)

10 kW

core components

PLC, Engine, Bearing, Gearbox

warranty

1 Year

machinery test report

Provided

video outgoing-inspection

Provided

Shipping

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Key attributes

Voltage
220 V
Power(W)
10 kW
core components
PLC, Engine, Bearing, Gearbox
machinery test report
Provided
warranty
1 Year
video outgoing-inspection
Provided
place of origin
Guangdong, China
Weight (kg)
100
brand name
BW
Vacuum System
Molecular pump (cryogenic pump) + backing pump
Vacuum Limit
Better than 3.0*10^-5 Pa
Pumping Speed
Pumping to 5.0*10^-4 Pa ≤ 30 min
Substrate Stage Size
≥160*160 mm
Substrate Stage Structure
Drawer-type structure, rotating for masking
Substrate Temperature
Room temperature, heated, water-cooled
Electron Beam Source
4~6 cavity crucible
Film Thickness Monitoring
Crystal oscillator monitor, accuracy 0.1 K/s

Packaging and delivery

Selling Units
Single item

Lead time

Product descriptions from the supplier